Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211278 | Substrate processing apparatus and substrate processing method | Suguru Enokida, Masashi Tsuchiyama, Keisuke Sasaki | 2021-12-28 |
| D922609 | Holding pad for substrate transfer | Toru Tokimatu | 2021-06-15 |
| D909603 | Holding pad for substrate transfer | Toru Tokimatu | 2021-02-02 |