Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181573 | Inspection apparatus and cleaning method of inspection apparatus | Tomoya Endo | 2021-11-23 |
| 11169206 | Inspection apparatus, inspection system, and aligning method | Jun Fujihara, Masanori Ueda | 2021-11-09 |
| 11099236 | Inspection device and contact method | Takanori Hyakudomi, Masanori Ueda, Jun Fujihara | 2021-08-24 |
| 11067624 | Inspection system | Hiroki Shikagawa, Jun Fujihara | 2021-07-20 |