MU

Masanori Ueda

TL Tokyo Electron Limited: 4 patents #38 of 787Top 5%
Overall (2021): #44,237 of 548,734Top 9%
4
Patents 2021

Issued Patents 2021

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
11169206 Inspection apparatus, inspection system, and aligning method Jun Fujihara, Kentaro Konishi 2021-11-09
11099236 Inspection device and contact method Takanori Hyakudomi, Jun Fujihara, Kentaro Konishi 2021-08-24
11073589 Diagnostic method for inspection device and inspection system 2021-07-27
10984520 User interface and maintenance guidance method 2021-04-20