Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189498 | Method of etching silicon-containing film, computer-readable storage medium, and apparatus for etching silicon-containing film | Takehiko Orii, Yasuo ASADA, Jun LIN, Ayano HAGIWARA, Shinji Irie +1 more | 2021-11-30 |