Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139183 | Systems and methods for dry wafer transport | Tsui-Wei Wang, Chui-Ya Peng | 2021-10-05 |
| 10943804 | Monitoring of process chamber | Bo Chen Chen, Sheng-Wei Wu | 2021-03-09 |
YT
Yung-Li Tsai
Overall (2021): #93,676 of 548,734Top 20%
2
Patents 2021