Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11162174 | Liquid delivery and vaporization apparatus and method | Hsin-Lung Yang, Chih-Ta Kuan | 2021-11-02 |
| 11139183 | Systems and methods for dry wafer transport | Tsui-Wei Wang, Yung-Li Tsai | 2021-10-05 |
| 10957697 | Polysilicon structure including protective layer | Yu-Shao Cheng, Shin-Yeu Tsai, Kung-Wei Lee | 2021-03-23 |