Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10962285 | Wafer drying system | Wei-Chun Hsu, Shu Wang | 2021-03-30 |
| 10943804 | Monitoring of process chamber | Bo Chen Chen, Yung-Li Tsai | 2021-03-09 |
SW
Sheng-Wei Wu
Overall (2021): #111,892 of 548,734Top 25%
2
Patents 2021