Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199466 | System and method for liquid leak detection | Yu-Kai Chen, Chin-Kun Fang, Ko-Bin Kao | 2021-12-14 |
| 11061333 | Manufacturing method of semiconductor device and semiconductor processing system | Yu-Kai Chen, Chia-Hung Chung, Ko-Bin Kao, Su-Yu Yeh, Zhi-You Ke +1 more | 2021-07-13 |
| 11029603 | Chemical replacement system | Yu-Kai Chen, Forster Yuan, Ko-Bin Kao, Shi-Ming Wang, Su-Yu Yeh +1 more | 2021-06-08 |
| 11004709 | Method for monitoring gas in wafer processing system | Wen-Chieh Hsieh, Su-Yu Yeh, Ko-Bin Kao, Chia-Hung Chung, Chun-Yu Chen +2 more | 2021-05-11 |
| 10943802 | Photoresist bottle container | Yu-Kai Chen, Chia-Hung Chung, Ko-Bin Kao, Shi-Ming Wang, Su-Yu Yeh +2 more | 2021-03-09 |