Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11061333 | Manufacturing method of semiconductor device and semiconductor processing system | Yu-Kai Chen, Ko-Bin Kao, Su-Yu Yeh, Li-Jen Wu, Zhi-You Ke +1 more | 2021-07-13 |
| 11004709 | Method for monitoring gas in wafer processing system | Wen-Chieh Hsieh, Su-Yu Yeh, Ko-Bin Kao, Li-Jen Wu, Chun-Yu Chen +2 more | 2021-05-11 |
| 10943802 | Photoresist bottle container | Yu-Kai Chen, Ko-Bin Kao, Shi-Ming Wang, Su-Yu Yeh, Li-Jen Wu +2 more | 2021-03-09 |