Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199466 | System and method for liquid leak detection | Yu-Kai Chen, Chin-Kun Fang, Li-Jen Wu | 2021-12-14 |
| 11061333 | Manufacturing method of semiconductor device and semiconductor processing system | Yu-Kai Chen, Chia-Hung Chung, Su-Yu Yeh, Li-Jen Wu, Zhi-You Ke +1 more | 2021-07-13 |
| 11029603 | Chemical replacement system | Yu-Kai Chen, Forster Yuan, Shi-Ming Wang, Su-Yu Yeh, Li-Jen Wu +1 more | 2021-06-08 |
| 11004709 | Method for monitoring gas in wafer processing system | Wen-Chieh Hsieh, Su-Yu Yeh, Chia-Hung Chung, Li-Jen Wu, Chun-Yu Chen +2 more | 2021-05-11 |
| 10978439 | Method and system of manufacturing conductors and semiconductor device which includes conductors | Kam-Tou Sio, Chih-Liang Chen, Chih-Ming Lai, Charles Chew-Yuen Young, Hui-Ting Yang +2 more | 2021-04-13 |
| 10943802 | Photoresist bottle container | Yu-Kai Chen, Chia-Hung Chung, Shi-Ming Wang, Su-Yu Yeh, Li-Jen Wu +2 more | 2021-03-09 |