Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056365 | Fault detection method in semiconductor fabrication facility | Hom-Chung Lin, Chin-Yun Chen, Tai-Hsiang Lin, Yu-Chi Tsai | 2021-07-06 |
| 10930527 | Method for controlling temperature of furnace in semiconductor fabrication process | Jian-Lun Lo, Feng-Yu CHEN, Yuan-Hsiao Su, Yi-Chi Huang, Yueh-Ting YANG +1 more | 2021-02-23 |