Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183405 | Semiconductor manufacturing apparatus | Chao-Tzung Tsai, Tzu Ken Lin, I-Chang Wu, Li-Jia Liou | 2021-11-23 |
| 11008654 | Apparatus and method for spatial atomic layer deposition | Anthony Hong Lin, Pei-Ren Jeng, Tze-Liang Lee | 2021-05-18 |