Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11008654 | Apparatus and method for spatial atomic layer deposition | Ching-Lun Lai, Pei-Ren Jeng, Tze-Liang Lee | 2021-05-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11008654 | Apparatus and method for spatial atomic layer deposition | Ching-Lun Lai, Pei-Ren Jeng, Tze-Liang Lee | 2021-05-18 |