Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957573 | Electrostatic chuck device including a heating member | Yukio Miura | 2021-03-23 |
| 10923381 | Electrostatic chuck device | Mamoru Kosakai, Yukio Miura, Kazunori Ishimura, Keisuke Maeda, Hitoshi Kouno +2 more | 2021-02-16 |