Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923381 | Electrostatic chuck device | Mamoru Kosakai, Yukio Miura, Kazunori Ishimura, Hitoshi Kouno, Yuuki Kinpara +2 more | 2021-02-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923381 | Electrostatic chuck device | Mamoru Kosakai, Yukio Miura, Kazunori Ishimura, Hitoshi Kouno, Yuuki Kinpara +2 more | 2021-02-16 |