Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107719 | Electrostatic chuck device and method for manufacturing electrostatic chuck device | Nobuhiro Hidaka, Hironori Kugimoto | 2021-08-31 |
| 10923381 | Electrostatic chuck device | Yukio Miura, Kazunori Ishimura, Keisuke Maeda, Hitoshi Kouno, Yuuki Kinpara +2 more | 2021-02-16 |