Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107719 | Electrostatic chuck device and method for manufacturing electrostatic chuck device | Nobuhiro Hidaka, Mamoru Kosakai | 2021-08-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107719 | Electrostatic chuck device and method for manufacturing electrostatic chuck device | Nobuhiro Hidaka, Mamoru Kosakai | 2021-08-31 |