Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11012008 | Electrostatic chuck device | — | 2021-05-18 |
| 10999521 | Imaging device and control method therefor | — | 2021-05-04 |
| 10923381 | Electrostatic chuck device | Mamoru Kosakai, Yukio Miura, Kazunori Ishimura, Keisuke Maeda, Hitoshi Kouno +2 more | 2021-02-16 |