Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094515 | Sputtering apparatus and sputtering method | Daisuke Suetsugu, Masaaki Tanabe, Yosimasa Takii | 2021-08-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094515 | Sputtering apparatus and sputtering method | Daisuke Suetsugu, Masaaki Tanabe, Yosimasa Takii | 2021-08-17 |