Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094515 | Sputtering apparatus and sputtering method | Daisuke Suetsugu, Akira Okuda, Yosimasa Takii | 2021-08-17 |
| 10898957 | Production apparatus and production method for fine particles | Hisao Nagai, Takeshi Koiwasaki, Takafumi Okuma | 2021-01-26 |