Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094515 | Sputtering apparatus and sputtering method | Masaaki Tanabe, Akira Okuda, Yosimasa Takii | 2021-08-17 |
| 11021788 | Sputtering method | Takafumi Okuma, Takahide Hirasaki | 2021-06-01 |