Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183433 | Method of evaluating silicon layer and a method of manufacturing silicon epitaxial wafer | Sayaka MAKISE, Shuichi Samata, Noritomo Mitsugi | 2021-11-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183433 | Method of evaluating silicon layer and a method of manufacturing silicon epitaxial wafer | Sayaka MAKISE, Shuichi Samata, Noritomo Mitsugi | 2021-11-23 |