Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183433 | Method of evaluating silicon layer and a method of manufacturing silicon epitaxial wafer | Sayaka MAKISE, Noritomo Mitsugi, Sumio Miyazaki | 2021-11-23 |
| 11047800 | Method of evaluating carbon concentration of silicon sample, method of evaluating silicon wafer manufacturing process, method of manufacturing silicon wafer, method of manufacturing silicon single crystal ingot, silicon single crystal ingot and silicon wafer | Kazutaka Eriguchi, Syun Sasaki | 2021-06-29 |
| 10935510 | Method of measuring carbon concentration of silicon sample, method of manufacturing silicon single crystal ingot, silicon single crystal ingot and silicon wafer | Kazutaka Eriguchi, Noritomo Mitsugi, Ayumi Masada | 2021-03-02 |