Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183433 | Method of evaluating silicon layer and a method of manufacturing silicon epitaxial wafer | Sayaka MAKISE, Shuichi Samata, Sumio Miyazaki | 2021-11-23 |
| 10935510 | Method of measuring carbon concentration of silicon sample, method of manufacturing silicon single crystal ingot, silicon single crystal ingot and silicon wafer | Kazutaka Eriguchi, Shuichi Samata, Ayumi Masada | 2021-03-02 |