Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11186772 | Etching composition, method for etching insulating film of semiconductor devices using the same and method for preparing semiconductor devices | Cheol Woo Kim, Kwang Kuk Lee, Jae Hoon Kwak, Young Bom Kim, Jung Ha Shin +1 more | 2021-11-30 |
| 11066601 | Composition for etching, method for etching insulator and method for manufacturing semiconductor device, and novel compounds | Cheol Woo Kim, Min Kyung Seon, Yu Na Shim, Jae Hoon Kwak, Young Bom Kim +1 more | 2021-07-20 |
| 11028321 | Etching composition, method for etching insulating layer of semiconductor devices and method for preparing semiconductor devices | Cheol Woo Kim, Yu Na Shim, Kwang Kuk Lee, Jae Hoon Kwak, Young Bom Kim +1 more | 2021-06-08 |
| 10941341 | Etching composition additive, method for preparing the same and etching composition comprising the same | Cheol Woo Kim, Yu Na Shim, Je-Ho Lee, Jae Hoon Kwak, Young Bom Kim | 2021-03-09 |