Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11066601 | Composition for etching, method for etching insulator and method for manufacturing semiconductor device, and novel compounds | Cheol Woo Kim, Yu Na Shim, Jae Hoon Kwak, Young Bom Kim, Jong Ho Lee +1 more | 2021-07-20 |