Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11186772 | Etching composition, method for etching insulating film of semiconductor devices using the same and method for preparing semiconductor devices | Cheol Woo Kim, Jae Hoon Kwak, Young Bom Kim, Jung Ha Shin, Jong Ho Lee +1 more | 2021-11-30 |
| 11054747 | Random copolymer, laminate, and method for forming pattern | Nam Kyu Lee, Sun Young Kim, Jin Su Ham | 2021-07-06 |
| 11028321 | Etching composition, method for etching insulating layer of semiconductor devices and method for preparing semiconductor devices | Cheol Woo Kim, Yu Na Shim, Jae Hoon Kwak, Young Bom Kim, Jong Ho Lee +1 more | 2021-06-08 |