Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10892733 | Piezo-actuated MEMS resonator with surface electrodes | Paul M. Hagelin, Ginel C. Hill, Nicholas Miller, Charles I. Grosjean | 2021-01-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10892733 | Piezo-actuated MEMS resonator with surface electrodes | Paul M. Hagelin, Ginel C. Hill, Nicholas Miller, Charles I. Grosjean | 2021-01-12 |