Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11082024 | Temperature stable mems resonator | Paul M. Hagelin | 2021-08-03 |
| 10910341 | Bonding process with inhibited oxide formation | Paul M. Hagelin | 2021-02-02 |
| 10892733 | Piezo-actuated MEMS resonator with surface electrodes | Joseph C. Doll, Paul M. Hagelin, Ginel C. Hill, Nicholas Miller | 2021-01-12 |