Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10892733 | Piezo-actuated MEMS resonator with surface electrodes | Joseph C. Doll, Paul M. Hagelin, Nicholas Miller, Charles I. Grosjean | 2021-01-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10892733 | Piezo-actuated MEMS resonator with surface electrodes | Joseph C. Doll, Paul M. Hagelin, Nicholas Miller, Charles I. Grosjean | 2021-01-12 |