Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139188 | Gas supply device, method for controlling gas supply device, load port, and semiconductor manufacturing apparatus | Toshimitsu Morihana | 2021-10-05 |
| 10947063 | Load port | Atsushi Suzuki | 2021-03-16 |
| 10930537 | Door opening/closing system, and load port equipped with door opening/closing system | Toshihiro Kawai, Munekazu Komiya, Takashi Shigeta | 2021-02-23 |
| 10923372 | Gas injection device | Toshihiro Kawai, Munekazu Komiya, Takashi Shigeta | 2021-02-16 |