Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10930537 | Door opening/closing system, and load port equipped with door opening/closing system | Toshihiro Kawai, Yasushi Taniyama, Takashi Shigeta | 2021-02-23 |
| 10923372 | Gas injection device | Toshihiro Kawai, Yasushi Taniyama, Takashi Shigeta | 2021-02-16 |