Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139188 | Gas supply device, method for controlling gas supply device, load port, and semiconductor manufacturing apparatus | Yasushi Taniyama | 2021-10-05 |
| 10923377 | Load port and method of detecting abnormality in FOUP lid of load port | — | 2021-02-16 |