Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009793 | Monomer, polymer, resist composition, and patterning process | Masahiro Fukushima, Masayoshi Sagehashi, Koji Hasegawa, Kazuhiro Katayama | 2021-05-18 |
| 10921710 | Resist composition and pattern forming process | Ryosuke Taniguchi, Kazuhiro Katayama | 2021-02-16 |