Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009793 | Monomer, polymer, resist composition, and patterning process | Masahiro Fukushima, Koji Hasegawa, Teppei Adachi, Kazuhiro Katayama | 2021-05-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009793 | Monomer, polymer, resist composition, and patterning process | Masahiro Fukushima, Koji Hasegawa, Teppei Adachi, Kazuhiro Katayama | 2021-05-18 |