Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11073756 | Photomask blank, photomask blank making method, and photomask making method | Hideo Kaneko, Shigeo Irie, Naoki Kawaura | 2021-07-27 |
| 11061319 | Photomask blank and making method | Tsuneo Terasawa, Shigeo Irie, Takahiro KISHITA | 2021-07-13 |
| 10989999 | Halftone phase shift mask blank and halftone phase shift mask | Yukio Inazuki, Kouhei Sasamoto, Hideo Kaneko | 2021-04-27 |