Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137678 | Method of evaluating photomask blank-associated substrate | — | 2021-10-05 |
| 11061319 | Photomask blank and making method | Takuro Kosaka, Tsuneo Terasawa, Shigeo Irie | 2021-07-13 |