Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143949 | Photomask blank, method of manufacturing photomask, and photomask | Yukio Inazuki | 2021-10-12 |
| 11131920 | Photomask blank, and method of manufacturing photomask | Yukio Inazuki, Naoki Matsuhashi | 2021-09-28 |
| 10989999 | Halftone phase shift mask blank and halftone phase shift mask | Yukio Inazuki, Takuro Kosaka, Hideo Kaneko | 2021-04-27 |