Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11131926 | Resist composition and resist patterning process | Takahiro Suzuki, Daisuke Domon, Keiichi Masunaga, Satoshi Watanabe | 2021-09-28 |
| 11124477 | Sulfonium compound, positive resist composition, and resist pattern forming process | Naoya Inoue, Masaki Ohashi, Daisuke Domon, Keiichi Masunaga | 2021-09-21 |