Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11131926 | Resist composition and resist patterning process | Takahiro Suzuki, Masaaki Kotake, Keiichi Masunaga, Satoshi Watanabe | 2021-09-28 |
| 11124477 | Sulfonium compound, positive resist composition, and resist pattern forming process | Naoya Inoue, Masaki Ohashi, Keiichi Masunaga, Masaaki Kotake | 2021-09-21 |
| 11048165 | Resist composition and patterning process | Jun Hatakeyama | 2021-06-29 |
| 11036136 | Onium salt, chemically amplified positive resist composition, and resist pattern forming process | Naoya Inoue, Satoshi Watanabe | 2021-06-15 |
| 10968175 | Resist composition and patterning process | Jun Hatakeyama | 2021-04-06 |