Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056320 | Substrate treating apparatus, substrate support unit, and substrate treating method | Kang Rae Ha | 2021-07-06 |
| 11056367 | Buffer unit, and apparatus for treating substrate with the unit | Dukhyun Son | 2021-07-06 |
| 11011405 | Apparatus for supporting substrate having gas supply hole and method of manufacturing same | Jae Kyung Lee | 2021-05-18 |