Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139195 | Lift pin unit and substrate supporting unit having the same | Hyung Joon Kim | 2021-10-05 |
| 11056320 | Substrate treating apparatus, substrate support unit, and substrate treating method | Sang Kee LEE | 2021-07-06 |