Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11011405 | Apparatus for supporting substrate having gas supply hole and method of manufacturing same | Sang Kee LEE | 2021-05-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11011405 | Apparatus for supporting substrate having gas supply hole and method of manufacturing same | Sang Kee LEE | 2021-05-18 |