Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950414 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Sang Ki Nam, Akira Koshiishi, Kwangyoub Heo, Sunggil Kang, Beomjin Yoo +1 more | 2021-03-16 |