Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149201 | Silicon nitride layer etching composition | Dong Hyun Kim, Hyeon Woo PARK, Du Won Lee, Jang Woo Cho, Myung Ho Lee | 2021-10-19 |
| 11091695 | Etching composition and etching method using the same | Hye Hee Lee, Hyeon Woo PARK, Myung Ho Lee | 2021-08-17 |
| 10982144 | Silicon nitride layer etching composition and etching method using the same | Dong Hyun Kim, Hyeon Woo PARK, Jang Woo Cho, Tae Ho Kim, Myung Ho Lee | 2021-04-20 |