Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149201 | Silicon nitride layer etching composition | Dong Hyun Kim, Hyeon Woo PARK, Jang Woo Cho, Myung Ho Lee, Myung Geun Song | 2021-10-19 |
| 10920142 | Polysiloxane-based compound, silicon nitride layer etching composition including the same | Dong Hyun Kim, Hyeon Woo PARK, Jang Woo Cho, Myung Ho Lee | 2021-02-16 |