Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149201 | Silicon nitride layer etching composition | Dong Hyun Kim, Du Won Lee, Jang Woo Cho, Myung Ho Lee, Myung Geun Song | 2021-10-19 |
| 11091695 | Etching composition and etching method using the same | Hye Hee Lee, Myung Ho Lee, Myung Geun Song | 2021-08-17 |
| 10982144 | Silicon nitride layer etching composition and etching method using the same | Dong Hyun Kim, Jang Woo Cho, Tae Ho Kim, Myung Ho Lee, Myung Geun Song | 2021-04-20 |
| 10920142 | Polysiloxane-based compound, silicon nitride layer etching composition including the same | Dong Hyun Kim, Du Won Lee, Jang Woo Cho, Myung Ho Lee | 2021-02-16 |