Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11109474 | Extreme ultraviolet generation apparatus | In Ho Choi, Min Seok Choi, Jeong Gil Kim, In Jae Lee, Sung Ho JANG | 2021-08-31 |
| 11016400 | Extreme ultraviolet exposure system | Sungho Jang, Sungyeol Kim, Keunhee Bai, Injae Lee | 2021-05-25 |