Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11016400 | Extreme ultraviolet exposure system | Sungho Jang, Hyuck Shin, Keunhee Bai, Injae Lee | 2021-05-25 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11016400 | Extreme ultraviolet exposure system | Sungho Jang, Hyuck Shin, Keunhee Bai, Injae Lee | 2021-05-25 |