Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11109474 | Extreme ultraviolet generation apparatus | Min Seok Choi, Jeong Gil Kim, Hyuck Shin, In Jae Lee, Sung Ho JANG | 2021-08-31 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11109474 | Extreme ultraviolet generation apparatus | Min Seok Choi, Jeong Gil Kim, Hyuck Shin, In Jae Lee, Sung Ho JANG | 2021-08-31 |